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  • CL
  • HORIBA
  • MP-VS Series
  • By using Cathodoluminescence generated by electron beam irradiation on the specimen, It is able to do material property estimation of minute area, observation of structure, defects and impurity estimation of material etc.
  • Application
  • Semiconductor impurity and defects estimation
  • Stress distribution estimation
  • Estimation of defects structure distribution in oxide film
  • Light emitting device estimation
  • Estimation of raw material in electronic device
  • Characteristic analysis of devices
  • 3 Dimensional quantum structure estimation
  • Device configuration
      Type1 Type2
    CL mirror Yes Yes
    CL Collection Unit Yes Yes
    Optical Fiber Yes Yes
    Spectrograph VS-70(includes CCD detector) VS-140(includes CCD detector)
    Laptop Yes Yes
    Specifications
    CL mirror Ellipsoidal mirror (WD=10)  
    CL Collection Unit Mirror stroke 150mm - 200mm  
    Optical Fiber Single core quartz fiber
    Core diameter: 100μm
    Length: 2m
     
    Spectrograph VS70 VS140
    Focal distance 70mm 140mm
    Numerical aperture f/2 f/2.4
    Meas.length range 280-800nm
    380-780nm(VIS)
    400-1100nm(VIS-NIR)
    200-800nm (UV-VIS)
    Wavelength resolution 2.0nm
    1.4nm(VIS)
    3.0nm(VIS-NIR)
    2.3nm (UV-VIS)
    Linearity 0.5nm 0.5nm
    Repeatability 0.1nm 0.1nm
    Detector LinearCCD (2048Pixel) LinearCCD (3864Pixel)
    Interface USB2.0